Please use this identifier to cite or link to this item:
https://has.hcu.ac.th/jspui/handle/123456789/3911
Title: | Experimental Study on Flexible Bismuth Telluride Thin Films Deposited by DC Sputtering at Different Powers |
Authors: | Supasak Kianwimol Pornsiri Wanarattikan Rachsak Sakdanuphab Prayoonsak Pluengphon Thiti Bovornratanaraks Aparporn Sakulkalavek พรสิริ วนรัฐิกาล ราชศักดิ์ ศักดานุภาพ ประยูรศักดิ์ เปลื้องผล ธิติ บวรรัตนารักษ์ อาภาภรณ์ สกุลการะเวก King Mongkut’s Institute of Technology Ladkrabang. Faculty of Science Huachiew Chalermprakiet University. Faculty of Science and Technology King Mongkut’s Institute of Technology Ladkrabang. College of Advanced Manufacturing Innovation Huachiew Chalermprakiet University. Faculty of Science and Technology Faculty of Science, Chulalongkorn University Thailand Center of Excellence in Physics. Commission on Higher Education |
Keywords: | Thin films ฟิล์มบาง Bismuth telluride บิสมัทเทลลูไรด์ Magnetron sputtering แมกนีตรอนสปัตเตอริง Sputtering (Physics) สปัตเตอริง (ฟิสิกส์) |
Issue Date: | 2019 |
Citation: | J. Electron. Mater. 48, 3490–3496 (2019) |
Abstract: | Bismuth telluride (Bi2Te3) thin films have been deposited onto polyimide sheet substrates by direct-current (DC) magnetron sputtering at different powers and their microstructure, composition, and electrical and thermoelectrical properties studied. The experimental results indicated that the sputtering power was the key parameter determining their thermoelectric properties. X-ray diffraction analysis confirmed the highly (015) preferred orientation of the films. The Te content and grain size depended on the sputtering power. The power factor of Bi2Te3 deposited by DC sputtering at power of 60 W was comparable to that obtained for highly (00l) Bi2Te3 thin film. |
Description: | สามารถเข้าถึงบทความฉบับเต็ม (Full text) ได้ที่ : https://link.springer.com/article/10.1007/s11664-019-07100-1 |
URI: | https://has.hcu.ac.th/jspui/handle/123456789/3911 |
Appears in Collections: | Science and Technology - Articles Journals |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Experimental-Study-on-Flexible-Bismuth-Telluride-Thin-Films-Deposited.pdf | 65.02 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.